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移相干涉仪的改进方法与实现

ISSN号：1005-4642
期刊名称：《物理实验》
时间：0
分类：O436.1[机械工程—光学工程;理学—光学;理学—物理] TH744.3[机械工程—光学工程;机械工程—仪器科学与技术;机械工程—精密仪器及机械]
作者机构：苏州科技大学数理学院江苏省微纳热流技术与能源应用重点实验室,江苏苏州215009
相关基金：江苏省“六大人才高峰”项目资助（No.2015-DZXX-026）; 苏州科技大学校科研基金项目资助（No.XKQ201513）

关键词：移相干涉, 视频采集, Zernike多项式拟合, tml PUBLIC ＂-//W3C//DTD XHTML 1.0 Transitional//EN＂＂http：//www.w3.org/TR/xhtml1/DTD/xhtml1-transitional.dtd＂〉 Full-Text Search：Home｜Journal Papers｜About CNKI｜User Service｜FAQ｜Contact Us｜中文《Physics Experimentation》 2017-10Add to Favorite Get Latest Update Improvement and implementation of phase shifting interferometerWANG Ting, ZHAO Yun, SUN Wen-qing, WANG Jun, WU Quan-ying, Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application,School of Mathematics and Physics,Suzhou University of Science and Technology, Video capture software was installed to record the process of phase shifting measurement from the monitor window.A group of phase shifting interferograms were selected from the captured video,and the wavefront map was calculated.The data processing scheme was described in detail,and the relevant code had been written.The calculated results were compared with Zygo MetroPro.The deviations of φ_p and φ_（RMS） were 0.005λand less than 0.001λ respectively.The accuracy and effectiveness of this proposed method were also verified by the Zernike polynomials fitting results.【Fund】：江苏省“六大人才高峰”项目资助（No.2015-DZXX-026）, 苏州科技大学校科研基金项目资助（No.XKQ201513）

中文摘要：

通过安装视频采集软件,从监视窗口记录相移过程.再从捕获视频中选出一组相移干涉图,经过相位计算,可得到波面分布.介绍了数据处理流程,编写了相关程序.将本方法与Zygo干涉仪MetroPro的计算结果进行了比较,φ_p和φ_（RMS）偏差分别为0.005λ和小于0.001λ.Zernike多项式拟合结果也验证了该方法的准确性和有效性.

英文摘要：

Video capture software was installed to record the process of phase shifting measurement from the monitor window.A group of phase shifting interferograms were selected from the captured video,and the wavefront map was calculated.The data processing scheme was described in detail,and the relevant code had been written.The calculated results were compared with Zygo MetroPro.The deviations of φ_p and φ_（RMS） were 0.005λand less than 0.001λ respectively.The accuracy and effectiveness of this proposed method were also verified by the Zernike polynomials fitting results.

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