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Simulation of Dual Frequency Capacitive Sheath over a Concave Electrode in Low Pressure
  • 期刊名称：CHIN. PHYS. LETT.
  • 时间：0
  • 页码：125202-1-125202-4
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： WANG You-Nian|DAI Zhong-Ling|HAO Mei-Lan|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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