中文摘要：

提出了微细群圆柱结构电化学腐蚀加工法及其形状和尺寸控制方式。根据电化学腐蚀基本原理，通过有限元分析计算群圆柱电化学腐蚀加工过程中的电场分布，优化设计阴极形状。开展了电化学腐蚀法制备微细群圆柱结构的工艺试验，获得了良好的试验结果。

英文摘要：

We propose to machine cylindrical micro-pins using the electrochemical etching method to control their shape and dimension. Following the electrochemical etching principle, we make finite element analysis（FEA） to calculate the electric field distribution during the machining of cylindrical micro-pins with the electrochemical etching method and perform the optimal design of their cathode profiles. We also do experiments on the fabrication process of cylindrical micro-pins and the results are satisfactory.