中文摘要：

针对大部分湿度传感器测量低相对湿度的不足,建立了一种配制低相对湿度环境的方法,并通过比较不同Nafion涂覆量的石英晶体微天平湿度传感器在低相对湿度下的湿敏曲线,综合考虑到QCM传感器的稳定性以及传感器对湿度变化的灵敏程度,得到QCM低湿度传感器较为合适的Nafion涂覆量。以此为基础,研究了此湿度传感器在低相对湿度的特性,实验结果表明基于QCM的Nafion低湿度传感器在1%~10%相对湿度范围内具有良好的线性,可以分辨相对湿度1%的变化。

英文摘要：

To improve the defect of humidity sensor in low humidity measurement, a method of low humidity environment preparation was presented in the paper,and the proper coated volume with Nation of QCM low-humidity sensor was gotten compre- hensively considering the stability of the QCM design sensor and sensor sensitive degree of humidity by comparing the humidity curves of different coated Nation volume of QCM low-humidity sensor.And on this basis, the characteristics of low humidity sensor were studied..The results show that the humidity sensor coated with Nafionhas good linearity when the humidity varied from 1% RH to 10%RH.In addition,the humidity sensor can tell I%RH humidity change.