中文摘要：

为提高Ti6Al7Nb合金耐磨性，采用磁控溅射技术在合金表面制备了TiN涂层，通过扫描电镜、光学显微镜、X射线衍射仪和销．盘式磨损实验研究了涂层的相结构和磨损性能。结果表明：涂层与基材结合良好，涂层的成分与结构随溅射时间而变化。溅射3h时，涂层由表及里的相组成依次为TiN、TiN＋Ti2N、Ti2N，其中TiN层硬度提高至基材的3倍。在10-40N载荷下涂层明显改善了合金的抗磨损性。表面改性后合金的磨损机制由原来的氧化磨损＋粘着磨损转变为以磨粒磨损为主。

英文摘要：

TiN coatings were successfully prepared by magnetron sputtering technology on biomedical Ti6Al7Nb alloy in order to improve its wear resistance. SEM and XRD were applied to observe the morphologies and analyze the structures of the coating, respectively. Pin-on-disc wear tests were carried out to compare the wear properties of specimen with and without coating. The results show that the coating has a good adhesion to the substrate. The composition and structure of the coating vary with sputtering time. When sputtered for 3 h, the coating is composed of TiN, TiN＋Ti2N, Ti2N from the outer surface to the inner layer in sequence. The micro-hardness of TiN layer is increased to 3 times that of substrate. The wear resistance of the surface modified specimens is greatly improved under 10-40 N load, and wear mechanism changes from original oxidative and adhesive to abrasive-dominant.