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Proceeding of “11th international conference on Recognition, Image and Physics in Semiconductor”
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  • 相关项目：微锗掺杂直拉硅单晶氧和微缺陷的研究
同期刊论文项目
微锗掺杂直拉硅单晶氧和微缺陷的研究
期刊论文 15 会议论文 3 著作 2
同项目期刊论文
Enhancement effect of germanium on oxygen precipitation in Czochralski silicon
Micto-defects in Ge doped Czochralski grown Si crystals
Influence of germanium doping on the mechanical strength of Czochralski silicon wafers
Germanium effect on as-grown oxygen precipitation in Czochraldki silicon
Germanium effect on oxygen-related defects in Czochralski silicon
Nitrogen-doped Czochralski silicon treated in rapid thermal process
Intrinsic gettering based on rapid thermal annealing in germanium- doped Czochralski silicon
Dissolution of oxygen precipitates in germanium-doped Czochralski silicon during rapid thermal annea
Enhanced oxygen out-diffusion in silicon crystal doped with germanium
Investigation of intrinsic gettering for germanium doped Czochralski silicon wafer
Crystal originated particles in germanium-doped Czochralski silicon crystal
Ge-vacancy pair in Ge-doped Czochralski silicon
Proceeding of the 2nd Sino-German symposium on silicon “ Wiley-VCH, 2006
直拉硅单晶中原生氧沉淀的透射电镜研究