中文摘要：

提出了在泵腔内加工引流道，以促使气泡迅速而有效地排除。从腔内压力方面分析气泡的滞留与输出性能的关系，同时从气泡压力降和流体阻尼方面分析引流道对气泡滞留的影响，最后通过实验验证引流道的引入对压电泵输出性能的影响以及对气泡滞留的优化效果。实验结果表明，引流道的引入能在一定程度上增强压电泵的输出压力和输出流量，引流道宽度为2.0mm时，输出压力和输出流量分别达到17.4kPa和20.8mL/min;当引流道宽度为1.1mm和1.5mm时,压电泵具有很强的气泡排除能力，并根除了断流现象的发生，120个0.02mL气泡进入后，压电泵仍具有稳定的输出压力（5.8kPa和5.6kPa）和输出流量（16mL/min和5.6mL/min）。在泵腔内加工引流道可以使气泡得到迅速而有效的排除，并减少气泡在泵腔内滞留。

英文摘要：

The retention of gas bubbles causes serious damage to the performance of piezoelectric micro-pump, and bubble retention occurs mainly in the pump cavity, thus reducing bubble retention in the pump cavity can greatly improve the reliability of piezoelectric micro-pump. The bubble has been eliminated quickly and effectively through the method of processing lead-flow path in pump cavity. The method has the advantages of easy processing, good universality and strong operability. The relationship between bubble retention and output performance through the pressure of pump cavity and the influence of lead-flow path on bubble retention through pressure drop of the bubble and flow resistance were analyzed. Finally, the effect of lead-flow path on output performance and bubble retention was verified by experiments. The experiment results showed that the output performance of piezoelectric micro-pump can be enhanced through processing lead-flow path in pump cavity, when the lead-flow path width was 2.0mm, the output pressure and output flow reached 17.4kPa and 20.8mL/min, respectively;when the lead-flow path width was 1.1mm and 1.5mm, the piezoelectric micro-pump had a strong ability to eliminate air bubbles. After entering 120 bubbles of 0.02mL, the piezoelectric micro-pump still had a stable output pressure （5.8kPa and 5.6kPa） and output flow （16mL/min and 5.6mL/min）. Processing lead-flow path in pump cavity can eliminate the bubbles quickly and effectively and reduce bubble retention in pump cavity.