中文摘要：

硅基材料光纤具有比较小的热膨胀系数,可用来制备具有折射率、应变、应力等敏感特性而温度不敏感特性的传感器件,比如利用光纤F-P传感器可实现高灵敏度的应力传感.本文提出了一种基于化学腐蚀法的低成本、高灵敏光纤F-P传感器件,并分析了其应力传感特性.该方法先利用HF溶液制备凹孔端面光纤,然后采用熔融放电方法制备空心结构的光纤FP传感器,有助于增强光纤器件的应力传感特性和温度不敏感能力.实验结果表明,所设计的F-P传感器其应力变化与光纤F-P传感器干涉谱峰变化呈正比关系,其应力灵敏度可以达到5.2,且成本较低廉,具有一定的应用价值.

英文摘要：

The optical fiber based on silicon materials has a smaller thermal expansion coefficient, therefore it can be used for the preparation of sensor devices which are insensitive to temperature but sensitive to refractive index, strain, stress, etc. For example, we can use optical fiber Fabry-Perot （F-P） sensor to achieve high sensitivity stress sensing. In this paper, we design an optical fiber F-P sensor with low cost and high sensitivity based on chemical etching method and analyze the stress sensing properties. Hydrofluoric acid is used to prepare the end face concave hole of the optical fiber first, and then the hollow struc-ture of the fiber F-P sensor is obtained by melting and discharge. This preparation method contributes greatly to enhancing the stress sensing properties and temperature insensitivity of the optical fiber device. The experimental results show that interference spectrum peak change is proportional to the stress change of optical fiber F-P sensor, stress sensitivity can reach 5. 2, and the cost is relatively low. Based on this,it has a certain application value in the stress sensing field.