为了测量晶体生长过程中旋转籽晶的结晶界面温度,针对旋转籽晶不便布线的问题,提出了用单片机和PT2262/2272无线发射/接收芯片与热电偶结合设计温度无线传感器的新方法。设计制作了一种无线温度传感器,经安装试用获得成功。较好地解决了旋转籽晶结晶界面温度检测问题。对晶体整个生长过程中结晶界面温度进行了实时检测、存储和记录。为分析晶体生长缺陷,进一步提高晶体生长质量提供了第一手资料。
Because seed rod always rotates in process crystal growth,it is difficult to measure crystallize interface temperature in crystal growth process. Aiming at the problem of difficult wiring of rotating seed crystal,a new method is put forward to design a wireless sensor with micro controller unit( MCU) and PT2262 /2272 wireless transmission / receiving chip and match up with thermocouple,realize wireless measurement of crystal growth temperature,and measurement result can be recorded and stored. It lays good foundation for analyzing crystal growth blemish and improving growth quality.