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中文摘要：
研究了应用于微波频段的多层纳米颗粒膜的电阻率、软磁特性和微波磁导率．采用多次顺序沉积Co40Fe40B20和SiO2薄层制备了薄膜．在100kA／m均匀面内磁场经过250℃真空退火2h，制备的Co40Fe40B20／SiO2多层膜具有难轴矫顽力为210A/m、饱和磁化强度为838．75kA／m、电阻率为2．06×10^3μΩcm，而且具有面内单轴各向异性场为2．78kA/m．该薄膜的微波磁导率实部为125并且保持到1．6GHz，其铁磁共振频率为1．73GHz；在1-2GHz范围，薄膜磁导率虚部具有较大值．
英文摘要：
The resistivity, soft magnetic properties and microwave permeability of multilayer nanogranular films suitable for high frequency applications have been investigated in this work. These films were prepared by repeated sequential depositions of thin layers of Co40Fe40 B20 and SiO2. After vacuum annealing at 250 ℃ under a uniform in-plane magnetic field of 100 kA/m for 2 h, the Co40 Fe40 B20/SiO2 multilayer films have the hard axis coercivity of 210 A/m, saturation magnetization of 838.75 kA/m, resistivity of 2.06 × 10^3 μΩem. Moreover, the results show that the films have an in-plane uniaxial anisotropy of 2.78 kA/m. As a consequence, the real part of measured permeability keeps constant at 125 up to 1.6 GHz. The resonance frequency was about 1.73 GHz.
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