中文摘要：

过渡族元素掺杂ZnO生成稀磁半导体,成为近期国际材料科学研究的热点.在本文中,研究Fe离子注入ZnO单晶的结构和磁性变化,目标是建立磁性和结构的对应关系,澄清铁磁性的来源.采用卢瑟福背散射/沟道技术（RBS/Channelling）、同步辐射X射线衍射（SR-XRD）和超导量子干涉仪（SQUID）,研究注入温度和退火对样品的晶格损伤、结构及磁性的影响.研究表明：样品注入区损伤随注入温度升高而降低;低温253K注入样品中,SR-XRD未检测到新相,Fe离子分布于Zn位,ZnO（0002）峰右侧肩峰可能属于Zn1-xFexO,5K下测试样品不具有铁磁性;623K注入和823K真空退火（253K注入）样品中形成α和γ相金属Fe,5K下样品具有明显的剩磁和矫顽力,零场冷却和场冷却（ZFC/FC）曲线和300K下的磁滞回线显示纳米Fe颗粒具有超顺磁性.Fe离子注入ZnO的磁性源于第二相α-Fe和γ-Fe.

英文摘要：

Due to its potential application to diluted magnetic oxides,transition metal doped ZnO has been under intensive investigation.We present a correlation between the structural and the magnetic properties of Fe implanted ZnO bulk crystals.Crystalline damage recovery,structural and magnetic properties are studied by Rutherford backscattering spectrometry and channelling（RBS/C）,synchrotron radiation X-ray diffraction（SR-XRD）,and superconducting quantum interference device magnetometer（SQUID）,respectively.The 623 K Fe ion implantation and the high vacuum annealing at 823 K lead to the formation of secondary phase α-Fe and γ-Fe nanoparticles.The discrepancy between the zero-field cooling and the field cooling curves further indicates that Fe-implanted ZnO is superparamagnetic and the observed ferromagnetism originates from the Fe nanoparticles.