中文摘要：

在金属钼表面制备了Mo-C—N-Si涂层，研究了涂层在1600℃大气环境下的氧化特性，采用SEM和XRD分析了涂层的微观结构和物相组成。结果表明：Mo-C-N—Si涂层以MoSi2为主相，SiC和Si3N4为次相，存在Mo2C＋MoxN中间层；由于扩散和氧化反应，涂层在氧化初期形成SiO2氧化膜层、MoSi2主体层、Mo5Si3层和Mo2C＋MoxN层等四层结构，氧化后期转变为Mo2C＋MoxN层和Mo3Si＋Mo5Si3层的双层结构，导致涂层失效。由于C、N的引入，涂层抗热震性能良好。

英文摘要：

Mo-C-N-Si coating on Mo substrates was prepared. The oxidation property of the coating at 1600 ℃ in air was investigated.Microstructures and phase composition of the coatings were analyzed by means of SEM and XRD, respectively. Results show thatMo-C-N-Si coating consists of the MoSi2, SiC and Si3N4 phases. The middle layer of Mo2C＋MoxN can be observed in the coating.Mo-C-N-Si coating becomes four layer structures, i.e. SiO2 oxidation layer, MoSi2 body layer, MosSi3 layer and Mo2C＋MoxN layer at theinitial stage of oxidation duet to the diffusion and oxidation. However, Mo-C-N-Si coating fails in the later stage, probably because itchanges to double-layer structures of Mo2C＋MoxN layer and Mo3Si＋ Mo5Si3 layer. In addition, the thermal shock resistance of the coatingis improved by the addition of the C and N elements.