中文摘要：

研究了一种在光探测器的结构设计中加入平面螺旋电感从而提高光探测器高速性能的新方法。对影响探测器频率响应的因素进行分析,结果表明,增加电感值可以减小结电容对高速性能的限制,仿真结果也得到同样的结论。根据理论分析结果制作出探测器并进行测量,测量数据显示,未加电感的光探测器高速性能只能达到2GHz,而加电感的光探测器高速性能最大,可以达到5GHz,证明了电感值的增加可以明显提高器件的高速性能,得到了与理论分析一致的结果。

英文摘要：

A novel method to improve the high speed performance for photodetector by changing its structure is reported. Analyzing the factors that affect the high speed performance,we find that the increase of inductor values can reduce the limitation from junction capacitance, which is verified by the results of emulation. Adding spiral inductors to devices, we fabricate and measure photodetectors. According to the results, the 3dB bandwidth of PD without inductors can only achieve 2 GHz,while those with inductors can achieve 5 GHz. This result agrees very well with that of theoretical analysis