中文摘要：

对自行研制的一种新型压阻敏感器和电阻加热器一体集成的纳机电热探针阵列传感器进行了存储特性研究。首先对器件电热特性和敏感特性进行测试，测试结果与模拟结果相吻合。在此基础上，进行数据存储测试，借助原子力学显微镜在聚合物有机薄膜上实现了数据写入，并研究了脉冲电压、脉冲宽度及其施加于探针上的力载荷对存储效果的影响，优化写入条件后，数据记录面密度达31．6GB／in^2．

英文摘要：

To meet ultra-high density requirement of next-generation data storage, the storage performance of a novel self-made nanomechanical electro-thermal probe array integrating a piezoresistive sensor and a resistance heater was investigated. Firstly, the electro-thermal performance and sensitivity characteristic were tested, and the test results were well consistent with those simulated. After studying the influences of pulse voltage, pulse width and applied force on the data-writing, about 31.6GB/in2 data-recording den- sity was realized successfully on PMMA（polymethyl methacrylate） polymer film by using AFM（atomic force microscope） equipment with the optimized thermal writing parameters.