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Monoatomic layer removal mechanism in chemical mechanical polishing,process: A molecular dynamics st
  • ISSN号：0021-8979
  • 期刊名称：Journal of Applied Physics
  • 时间：0
  • 页码：1-7
  • 语言：英文
  • 相关项目：超光滑表面加工中纳米颗粒与表面间的微观作用机制研究
作者： Luo JB|Guo D|Si LN|
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超光滑表面加工中纳米颗粒与表面间的微观作用机制研究
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