中文摘要：

SimEvents与Petri网相结合是一种很好的复杂生产线建模仿真方法，应用这一方法建立了一条300mm晶圆生产线的仿真模型。描述了其Petri网模型建立的总体流程和各个详细步骤，以及在SimEvents环境下实现Petri网模型并进行仿真的关键技术。在此基础上，对晶圆生产的不同调度方案分别进行了仿真，并把仿真结果进行了比较，从而验证了仿真建模方法的正确性。

英文摘要：

The combination of SimEvents and Petri Nets is a good method for the modeling and simulation of the complicated production line.In this paper,the simulation model of a 300mm wafer fab is built up.The overall process and steps of modeling the wafer fab by using Petri Nets are described in detail.Basic steps and key techniques of implementing the Petri Nets model and simulating the wafer fab based on SimEvents are presented.Different schedule schemes are simulated and the results are analyzed to prove the correctness of the modeling method mentioned-above.