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中文摘要：
研究了热分解气氛对溶胶-凝胶法制备在Pt／Ti／SiO2／Si衬底上的Bi3．25La0.75Ti3O12（BLT）薄膜铁电性能的影响。在400℃时空气或氧气气氛下热分解20min，接着在700℃时氧气气氛下退火30min。氧气气氛下的热分解能充分分解掉薄膜中的有机成分，而空气气氛下的热分解使炭、氢有机成分部分残留在薄膜中。有机成分的不完全分解影响了退火过程中BLT薄膜晶化时晶粒的生长。表现出生长取向和晶粒尺寸对BLT薄膜铁电性能的影响。氧气和空气气氛下热分解的薄膜的剩余极化（Pr）和矫顽电场（Ec）分别为18．85μC／cm^2，119．7kV／cm和12．56μC／cm^2、112．5kV／cm。氧气气氛下热分解的薄膜的剩余极化值显著提高。所以热分解是控制铁电性能的重要步骤。
英文摘要：
The effect of pyrolysis atmosphere was investigated for Bi3.25 La0.75 Ti3O12 （BLT） films prepared on Pt/ Ti/SiO2/Si substrates by sol-gel processes. The pyrolysis was done at 400℃ for 20min under air or O2 ambient and the successive anneal was done at 700℃ for 30min under O2 atmosphere. The pyrolysis under O2 was enough for removal of organic species, however after pyrolysis under air, carbon and hydrogen atomic species as organic fragment were partly remained in the film. This incomplete removal of organic fragments affect the grain growth during anneal for the crystallization of BLT film. The growth direction and grain size of BLT film was revealed to affect ferroeleetrie properties. The remnant polarization（Pr） and coercive electric field （Ec） for the BLT films of pyrolysis under O2 and air were measured as 18.85μC/cm^2 , 119.7kV/cm and 12.56μC/cm^2, 112.5kV/cm, respectively. The Pr for the BLT film of pyrolysis under O2 is improved dramatically. So it can be concluded that the pyrolysis is an important procedure to control ferroeleetrie properties.
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