中文摘要：

基于泄漏模共振产生多层介质膜光栅（MDG）的-1级高衍射效率的理论,重点分析了产生MDG的-1级宽衍射角谱的物理机理,提出薄匹配层能有效提高MDG的-1级衍射角谱带宽.采用傅里叶模式理论计算MDG的衍射效率,给出了中心波长为1040nm,Littrow角37.9°附近±11°范围内衍射效率大于90%的宽角谱MDG设计结果,且设计参数具有良好的工艺宽容度.

英文摘要：

Based on the leaky mode resonance theory,the physical mechanism of producing the broad angular spectrum of Multilayer Dielectric Grating （MDG） in the -1 st order reflection diffraction direction is presented in this paper. It is found that the thin match layer would improve the bandwidth of angular spectrum effectively. A good result of ± 11 degree near Littrow angle 37. 9 over 90% diffraction efficiency centered at 1040nm is obtained,and the parameters of the result have excellent fabrication tolerance. The Fourier modal method is employed for calculating the diffraction efficiency.