中文摘要：

主要讲述了单晶体硅电池、多晶体硅电池、微晶硅电池及薄膜硅电池的性质及特点，同时介绍了硅太阳能电池的发展历程；讲述了纳米硅薄膜太阳能电池的等离子体增强化学气相沉积制备及沉积理论；论证了H稀释浓度对硅纳米薄膜太阳电池性能的影响；阐述了沉积气压和衬底温度对薄膜性能的影响；最后讲述了透明导电薄膜在薄膜太阳能电池中的应用情况及光学性质。

英文摘要：

We study the properties of the monocrystalline, polycrystalline, microc~Tstalline, thin film solar cell, and introduce the development of silicon solar cell. The plasma enhanced chemical vapor deposition method and deposition theory on silicon thin film solar cell are discussed by us. The per- formanc influence of the H dilution concentration on silicon nanocrystals film solar cell is demonstra- ted. It is reported on the correlation of the film performance and the deposition pressure and the sub- strate temperature. Finally, we discussed the application of the transparent conductive film in the thin film solar cell the and their optical properties.