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中文摘要：
阐述了基于光纤布拉格光栅原理的三维触发式坐标测量机测头传感系统及控制箱设计方法,从机械结构、传感信号解调系统以及测量过程中逼近速度和逼近距离等几个角度分析了测头误差来源。根据测头的设计参数要求进行了测头的灵敏度、复位性和测力等性能实验,结果表明该测头单方向重复定位精度为20 nm,灵敏度为50 nm,测量力小于5 mN。
英文摘要：
A 3-D coordinate measuring machine（CMM） touch trigger probe based on fiber Bragg gratings was developed.The sensing system and the control box of the probe were described respectively.The error of the probe may arise from the mechanical structure,the sensing signal demodulation system,the measuring speed and the approaching distance during the process.Experiments showed that probe positioning accuracy in single direction could reach 20nm,sensitivity came up to 50nm and a measuring force was less than 5mN.
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