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Thickness uniformity and surface morphology of Fe, Ti, and Hf films produced by filtered pulsed cath
  • ISSN号：0257-8972
  • 期刊名称：Surface & Coatings Technology
  • 时间：0
  • 页码：887-892
  • 语言：英文
  • 相关项目：一种等离子体基离子注入/沉积新方法的基本理论和技术研究
作者： Li, LH Lu, QY Fu, RKY Chu, PK|
同期刊论文项目
一种等离子体基离子注入/沉积新方法的基本理论和技术研究
期刊论文 15 会议论文 3 获奖 2
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