有限基于元素的 thermoelastic 为六角形的碳化矽 polytype 的各向异性的压力模型为热压力的计算被开发在原文如此,物理蒸汽种的晶体搬运方法。水晶和石墨盖在模型被考虑的原文如此成长的合成结构。在坩锅盖之间的热扩大火柴并且原文如此,水晶第一次被学习。脱臼密度和水晶质量上的热应力的影响被讨论。
A finite element-based thermoelastic anisotropic stress model for hexagonal silicon carbide polytype is developed for the calculation of thermal stresses in SiC crystals grown by the physical vapor transport method. The composite structure of the growing SiC crystal and graphite lid is considered in the model. The thermal expansion match between the crucible lid and SiC crystal is studied for the first time. The influence of thermal stress on the dislocation density and crystal quality is discussed.