中文摘要：

LIGA技术是一种可以利用多种材料获得大高宽比微结构的微细加工方法。介绍了LIGA技术的原理和国家同步辐射实验室LIGA试验线站的参数。详细给出NSRL近年来在同步辐射光刻、微电铸和微塑铸等LIGA技术方面的研究进展，同时给出其在微惯性器件和微流体器件等LIGA应用方面的研究进展。分析LIGA技术研究及应用的发展现状以及所遇到的困难，结合同步辐射光刻的特点，提出LIGA应用的一些展望。

英文摘要：

LIGA（Lithographie galvanformung and abformug） process is a micro fabrication method that can use various materials to obtain high aspect ratio microstructures. The principle of LIGA techniques and the parameters of LIGA experimental station at NSRL are introduced. The recent progresses in the research of LIGA techniques at NSRL, such as synchrotron radiation lithography, mi- cro-electroforming, micro-molding, and the application of LIGA techniques, such as micro-inerial devices and micro-fluidic devices, are presented in detail. The development status of research and application of LIGA techniques and the problems encountered are analyzed. Some of the prospects of LIGA application are put forward by combining the features of synchrotron radiation lithgraphy.