中文摘要：

纳米压痕技术是一种新的材料特性测量方法,被广泛应用在研究微/纳零部件的力学性能和材料微纳区域内的局部特性。介绍了纳米压痕技术的基本理论方法;针对纳米压痕技术的理论建模、压痕形貌、微观组织以及测量精度等几个方面对现有的研究成果进行系统的分析和总结;分析了纳米压痕技术现存的研究难点及主要问题,并对其发展趋势进行了展望。

英文摘要：

As an advanced measuring technology,nano-indentation technology has been widely used in small volumes,especially for the measurement of material properties at microscopic and smaller scale to identify material parameters. Therefore,it is necessary to systematically and intensively review current achievements. Firstly,the principle of nano-indentation technology is analyzed. Then,the research progress both at domestic and abroad is summarized. Lastly, the research difficulties and the main problems in current research of nano-indentation technology are pointed out. The development trends of nano-indentation technology are proposed.