中文摘要：

结合力是制约金刚石涂层工具大规模应用的关键因素之一。针对热丝化学气相沉积制备的金刚石薄膜的膜基结合力进行划痕实验,运用划痕仪所测的声发射数据、摩擦力数据及光学、电子扫描划痕形貌来综合评定膜基结合力。评定结果表明：单一的声发射图谱或摩擦力曲线不能准确判定膜基结合力的表征值临界载荷,声发射图谱、摩擦力曲线与划痕形貌综合评定临界载荷结果才可信。

英文摘要：

The adhesion between diamond film and substrate is one of the key factors limiting the diamond coating tools to be applied in a large scale.The diamond films were deposited by hot filament chemical vapor deposition on silicon substrate.The scratch tracks made with a micro-scratch tester（MST） were characterized with an optical microscope.The adhesion at the interface of the diamond films and the substrate were then evaluated by calculating the acoustic emission and frictional force data obtained with the MST,and the optical images micrographs of the scratches.The results show that neither acoustic emission spectra nor friction force curve can exclusively determine the adhesion strength;the critical load and the interfacial adhesion can only be precisely evaluated by combining the acoustic emission spectra,the friction force curve and the scratch truck morphologies.