中文摘要：

利用改进的CVD法制备了（002）面取向生长的ZnO纳米线,通过光刻/剥离的自下而上的组装技术制备了基于单根ZnO纳米线的气敏元件,其中的ZnO纳米线直径为50-300nm,有效长度为2-10μm.测试表明在室温条件下,元件对浓度为500μL·L-1的氧气和乙醇的灵敏度可以分别达到1.3和1.2,而气敏响应时间分别为10和5s,由于单根纳米线的一维小尺寸结构加剧了电流的自加热效应,因此元件在外界环境为室温的条件下的灵敏度才略有提高.

英文摘要：

ZnO nanowires with （002） oriented direction was synthesized via modified CVD method. Bottom-up assembly including photolithography/lift off was employed to fabricate gas sensor based on single ZnO nanwire with 50-300 nm in diameter and 2-10 μm in length. The as-prepared device showed gas sensitivities of 1.3 and 1.2 to oxygen and ethanol gases with concentration of 500 μL·L^-1 at room temperature, and the corresponding temporal responses were 10 and 5 s, respectively. The improved gas sensing properties were attributed to the enhancement of the current-induced heating on the quasi-one-dimensional nanostructure.