研制了一台储能为8kJ的高压脉冲电源,该电源主要由高频高压电容充电电源,储能电容器组,放电开关,放电电极和安全泄放装置组成。高压充电电源采用市电通过干式变压器升压,然后全桥整流后向高压储能电容充电,最后通过触发高压空气开关将电容中储能在放电电极处释放掉。高压测量端与控制系统采用光电隔离技术,减小了电磁干扰对控制系统的影响,同时提高了操作安全性。最后对多晶硅材料进行放电实验,结果表明,电极放电可在试样中产生明显的破碎效果。
A high voltage pulsed power supply with a stored energy of 8kJ is developed. The pulsed power supply is mainly composed of a high voltage high frequency charging supply,energy storage capacitors,discharging electrodes and a safety discharging device. The charging supply adopts the full bridge inverter and series resonant mode. A high voltage dry type transformer is used. An optical fiber is used to isolate and transmit the high voltage signal between high voltage part and control system. Experimental results show that fracture can be generated under high energy pulse discharging.