中文摘要：

概括分析了光栅纳米测量中双光栅测量系统、炫耀光栅测量系统、基于误差修正技术的光栅纳米测量系统、基于二次莫尔条纹原理的纳米光栅测量系统的测量原理。介绍了纳米测量精度光栅传感器研究的关键技术。

英文摘要：

This paper analyses the measuring principles of measuring system of dual grating, measuring system of blazed grating, nanometrology measuring system of grating based on error correction methods and nanometrology measuring system of grating based on two times Moire＂ fringe. And this paper introduces the key technology for further research on nanometrology measuring based on grating.