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中文摘要：
利用扫描电镜、X射线衍射和电子背散射衍射研究了CVD自支撑金刚石薄膜的表面形貌组织、织构和晶界分布。研究表明：金刚石薄膜制备气氛纯度较低，造成薄膜中存在较多孪晶。沉积气体中甲烷浓度升高，孪晶发生频率增加，孪晶对织构组分的影响程度增加。高频率孪晶使薄膜中{100}织构转变为{122}织构，但没有观察到明显的{511}和{411}孪晶织构，说明孪晶取向的变化具有一定的选择性。
英文摘要：
The surface morphology, texture and grain boundary distribution of CVD free-standing diamond film were investigated by scanning electron microscopy （SEM）, X-ray diffraction （XRD） and electron backscatter diffraction （EBSD）. It is shown that the preparation atmosphere with lower purity induced a number of twins in diamond film, the frequency of twins increased with the raise of methane concentration, which brought an increased effect on the texture. {100} texture was turned to {122} texture by the high frequency twins, but {511} and {411} textures were not found, indicating that the changed twin orientations were selective to some extent.
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