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Tribo-chemical Behavior of Copper in Chemical Mechanical Planarization
  • ISSN号：1023-8883
  • 期刊名称：Tribology Letters
  • 时间：2013.5.5
  • 页码：177-184
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Li, Jing|Chai, Zhimin|Liu, Yuhong|Lu, Xinchun|
同期刊论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 85 会议论文 3 获奖 22 专利 63
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