中文摘要：

为了探索平板微热管的传热特性,了解微热管内不同温度区间的蒸汽传输特性,开展了热式气体微流量传感器及其检测系统的设计。设计了一种便于探索最佳温度测量点的热式微流量传感器结构,利用MEMS工艺进行加工制作,在不同环境温度下对其性能进行了测试,得到了环境温度与热式微流量传感器性能的关系。基于MSP430单片机和C#语言自主开发了流量传感器检测系统,可对一定范围内的流量进行实时检测,并实时绘制流速随时间的变化曲线。研究表明,采用本文设计的热式微流量传感器结构,可以检测高于室温环境下的微流量气体,并可通过提高加热器温度或改变测温电阻对的测量位置来提高测量灵敏度。

英文摘要：

In order to explore flat micro heat pipes＇ transfer characteristics and understand vapor transmission characteristics at different temperatures,this paper carried out the research on thermal micro flow sensor and its detection system. This paper designed a kind of thermal micro flow sensor structures which is easy to explore the optimum detection points. The micro flow sensor was fabricated with MEMS technology and the relationship between its performance and environment temperature has been described by testing in different temperature environment conditions. The flow sensor detection system that can real-time display the flow rate within a certain range and draw the curve of flow rate versus time was developed based on MSP430 microcontroller and C # language. Studies showed that the structure of the thermal micro flow sensor designed in this paper could detect the micro gas flow rate above room temperature,and the measurement sensitivity could be improved by increasing the heater temperature or changing the position of temperature sensor pairs.