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Etching blazed grating into quartz substrate with selectivity 1:1 against photoresist by inductively
  • ISSN号：0030-4026
  • 期刊名称：OPTIK
  • 时间：0
  • 页码：402-406
  • 相关项目：螺旋轴锥镜产生的新型光束激发局域表面等离激元的研究
作者： Sun, Xiao-Dong|Kuang, Deng-Feng|Mu, Guo-Guang|
同期刊论文项目
螺旋轴锥镜产生的新型光束激发局域表面等离激元的研究
期刊论文 7 会议论文 1
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