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沉积温度对CVD-HfC涂层微观结构和力学性能的影响
  • ISSN号：1672-7207
  • 期刊名称：中南大学学报(自然科学版)
  • 时间：2013.4.4
  • 页码：1351-1358
  • 分类：TB332[一般工业技术—材料科学与工程]
  • 作者机构：[1]中南大学粉末冶金国家重点实验室,湖南长沙410083
  • 相关基金：国家基础研究发展计划（2011CB605805）; 国家创新团体基金资助项目（51021063）
  • 相关项目：特种粉末冶金材料应用基础研究
作者： 赵学嘉|熊翔|王雅雷|李国栋|
关键词： HfC涂层, 沉积温度, 微观结构, 力学性能, 化学气相沉积, HfC coating, deposition temperature, microstructure, mechanical property, chemical vapor deposition
中文摘要：

采用HfCl4-CH4-H2-Ar体系,利用化学气相沉积法（CVD）在C/C复合材料表面制备HfC涂层。利用X线衍射仪、扫描电子显微镜和纳米压痕测试仪对涂层的微观结构和力学性能进行表征与分析。研究沉积温度对HfC涂层的物相组成、沉积速率、微观结构和力学性能的影响。研究结果表明：在1 400~1 600℃沉积温度内,沉积涂层均由单一的立方HfC组成。随着沉积温度的提高,HfC涂层沉积速率逐渐增加;涂层表面HfC晶粒的择优取向面由（220）向（200）转变,涂层组织结构由细柱状晶转变为粗大柱状晶。HfC涂层的显微硬度和弹性模量分别在16~21 GPa和247~282 GPa之间。1 500℃沉积HfC涂层的力学性能最佳,其显微硬度和弹性模量分别达到20.29GPa和282.34 GPa。

英文摘要：

HfC coatings were prepared on C/C composites by chemical vapor deposition （CVD） with HfCI4-CH4-H2-Ar system. The microstructure and mechanical properties of the as-prepared coating were investigated by X-ray diffraction （XRD）, scanning electron microscopy （SEM） and ultra nano-indentor tester. Effects of deposition temperature on phase compositions, deposition rates, microstructure and mechanical properties were investigated. Results show that all of as-prepared coatings exhibit FCC HfC phase. With temperature increasing, the deposition rate increases. The preferential orientation of the HfC crystals changes from （220） to （200）, and the coating structure changes from fine to coarse columnar crystals. The hardness and modulus of the HfC coating are in a range of 16-21 GPa and 247-282 GPa, respectively. At 1 500 ℃, the most favorable hardness and modulus are 20.29 GPa and 282.34 GPa, respectively.

同期刊论文项目
特种粉末冶金材料应用基础研究
期刊论文 181 会议论文 3 专利 16
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期刊信息
  • 《中南大学学报：自然科学版》
  • 北大核心期刊（2011版）
  • 主管单位:教育部
  • 主办单位:中南大学
  • 主编：黄伯云
  • 地址：湖南长沙中南大学校本部
  • 邮编：410083
  • 邮箱：zngdxb@csu.edu.cn
  • 电话：0731-88879765
  • 国际标准刊号：ISSN：1672-7207
  • 国内统一刊号：ISSN：43-1426/N
  • 邮发代号:42-19
  • 获奖情况:
  • 首届全国优秀科技期刊评比一等奖,第二届全国优秀科技期刊评比一等奖,首届中国有色金属工业优秀科技期刊评比一等奖
  • 国内外数据库收录:
  • 美国化学文摘（网络版）,荷兰文摘与引文数据库,美国工程索引,英国科学文摘数据库,中国中国科技核心期刊,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）
  • 被引量:20874