非结晶的 chalcogenide 薄电影被搏动的激光免职技术制作。此后, multilayered 的栈变瘦为反射镜和 microcavity 的电影为电信波长被设计。准备 multilayered 为反射镜的薄电影显示出好相容性。microcavity 结构由 Ge 25 Ga 5 Sb 10 S 65( 做了与嗯二 5 层作为 403+) 分隔符层 > Se 60/Ge25 Sb 5 S 70 反射镜。扫描 / 传播的电子显微镜学结果显示出在轮流出现的绝缘的层之间的好频率,大坚持和光滑的接口,它证实在不同材料之间的合适的相容性。结果证明 chalcogenides 能被用于与高质量准备垂直布拉格反射镜和 microcavity。
Amorphous chalcogenide thin films were fabricated by the pulsed laser deposition technique. Thereafter, the stacks of multilayered thin films for reflectors and microcavity were designed for telecommunication wavelength. The prepared multilayered thin films for reflectors show good compatibility. The microcavity structure consists of Ge25Ga5Sb10S65 (doped with Er3+) spacer layer surrounded by two 5-layer As40Se60/Ge25Sb5S70 reflectors. Scanning/transmission electron microscopy results show good periodicity, great adherence and smooth interfaces between the alternating dielectric layers, which confirms a suitable compatibility between different materials. The results demonstrate that the chalcogenides can be used for preparing vertical Bragg reflectors and microcavity with high quality.