中文摘要：

为深入研究压电驱动器的输入一输出特性曲线，建立了压电驱动器的机电动力学模型，画出了机电模型的信号流图，解释了压电驱动器产生非线性滞环现象的成因；研发了压电式二维微动平台和电荷反馈式驱动电源，对模型及其预测结果进行了实验验证。理论分析与实验数据表明，压电驱动器外部电荷反馈回路的作用与正压电效应所形成的内部电荷反馈回路的作用是一致的．

英文摘要：

In order to study the essence of the input-output of piezo-actuators, the electromechanical dynamic model of the piezo-actuator is presented, and the cause of formation of nonlinear hysteresis inhered in the actuator is explained based on the signal flow chart of the model, two dimension piezo-type microdisplacement platform and its activating power with charge feedback are developed for verifying the model and the explanations. The model analysis and experimental results show that effect of the exterior charge feedback loop in the power is similar to the interior charge feedback loop which is formed by the direct piezoelectricity of the piezo-actuator.