中文摘要：

使用脉冲激光沉积技术，不同的衬底温度，在单晶Si（100）衬底上沉积了锂离子电池正极材料Li-CoO2的薄膜．用XRD对样品进行晶体结构分析，用SEM观察了样品的表面形貌．结果显示，衬底温度对LiCoO2薄膜的微观结构和表面形貌都有明显影响．在500℃以上的衬底温度下生长的样品结晶质量较好；晶体的颗粒尺寸随着温度的升高而增大．

英文摘要：

LiCoO2 thin film samples have been prepared on monocrystal Si（100） by pulsed laser deposition（PLD） under different substrate temperature. The microstructure and surface morphology of the samples were analyzed by the technique of X-my diffraction （XRD） and scanning electron microscope（SEM） respectively. The results reveal that distinct influence appear at the microstructure and surface morphology of the LiCoO2 thin films prepared by PLD under different substrate temperature. The samples grown above 500 ℃ display fine crystalline quality; the higher substrate temperature incline to develop the bigger grain size of the thin films.