中文摘要：

抽速是决定低温泵抽气性能的关键参数，高质量的抽速测试结果可有效指导低温泵的工程设计与实验运行。介绍了低温泵抽气性能测试平台的组成和抽速测量的基本原理，分析了压力和充气量的不确定度分量来源，研究了各不确定度分量的估计与合成，确定了低温泵的抽速测量不确定度，给出了抽速测量结果的完整表述，探讨了降低抽速测量不确定度、提高测量结果质量所采取的措施。研究结果对合理配置低温泵抽气性能测试平台、优化实验方案、提高抽速测量结果可靠性有指导意义。

英文摘要：

Pumping speed is a key performance parameter of eryopump. High quality result of tested pumping speed can guide engineering design and experimental operation of cryopump. The makeup of pumping performance test platform of cryopump and the principle of pumping speed measurement were introduced. Both the different parts of uncertainty and combined uncertainty of pressure and injected gas quantity were calculated by analyzing the sources of them and selecting suitable evaluation methods. The uncertainty of pumping speed was determined and the result of pumping speed was formulated. Measurements for decreasing the uncertainty of pumping speed and making the result more qualified were discussed. The investigation may be significant for optimizing the design of pumping performance test platform of cryopump and test scheme and for increasing the reliability of the result of tested pumping speed.