中文摘要：

针对高精度直线电机驱动XY平台轮廓控制系统，将摩擦补偿与轮廓控制相结合，提高系统轮廓精度。设计基于LuGre模型的状态观测器及摩擦估计器以消除摩擦非线性对系统的影响，采用适于一般自由曲线轮廓控制的实时轮廓误差法建立系统轮廓误差模型与切向误差模型，结合观测状态，设计基于摩擦补偿的轮廓控制器。理论的分析和仿真结果表明，所设计控制系统能够提高XY平台的轮廓精度。

英文摘要：

For the high precision linear motor direct drive XY table system, the influences on the system are analyzed, including the nonlinear dynamic friction forces, the velocity mismatch between two axes and the problem of the free-form contour trajectory model. A control strategy based on combining the fric- tion observer and contour controller was proposed. To enhance the free-form contour following perform- ance, real-time contour error algorithm applicable for multi-axes nonlinear motion system was adopted. The state observer based on friction compensate can overcome the influences of the nonlinear dynamic of the single axis, but the influences on the servo contour performance by the velocity mismatch between two axis cannot be entirely eliminated by the state observer. According to the state observation theory, con- tour controller was designed to entirely improve the contour quality. The simulation results show that the designed controller makes the system of XY table have high contour machining precision.