介绍了一种利用激光选择聚焦的结构来增强光电探测器的光电响应的方法。通过采用工作在传输模式的振幅型菲涅耳波带片,获得了较高的激光收集效率,同时也较好地抑制了背景光。当激光入射时,集成了菲涅耳波带片的InGaAs/InP p- i- n 光电探测器和InGaAs/InP 雪崩光电二极管的响应分别增强了36倍和4倍,而当模拟自然光的卤钨灯照射时,集成了菲涅耳波带片的两类光电探测器的响应均被抑制了30%。集成了菲涅耳波带片的探测器显现出对激光信号的较强吸收,对模拟自然光的卤钨灯光源的明显抑制。
Laser selective focusing structure has been introduced to enhance the response of the photodectectors remarkably. By using the amplitude Fresnel zone plate lens (FZPL) working in transmissive mode, high energy collection of laser light and high suppression of the other background light were obtained. A 36í gain and a 4í gain in responses were obtained for a mesa InGaAs/InP p- i- n photodetector and a planar InGaAs/InP avalanche photodetector(APD) integrated with FZPLs respectively, compared with the responses without FZPLs, when illuminated by the laser light. While illuminated by the Tungsten-halogen lamp, 30% deductions in responses were obtained with FZPLs compared with the responses without FZPLs. Strong enhancement of laser light absorption and obvious suppression of the light from the Tungsten-halogen lamp were obtained.