中文摘要：

在工艺参数实验和理论设计分析的基础上,制备了包括多孔硅Bragg反射镜、多孔硅微腔和稳定 性很好的多孔硅三元结构在内的多孔硅一维光子晶体,对3种多孔硅光子晶体的结构进行了表征,不同孔 隙度的多孔硅呈现出周期性的排列。采用单光束反射Z扫描方法分别对3种结构的多孔硅在1064nm波长处的非线性折射率进行了测量。实验结果表明,多孔硅三元结构光子晶体的三阶非线性折射率比 多孔硅Bragg反射镜和多孔硅微腔高1个数量级,这将为多孔硅一维光子晶体用于先进光电器件的设计提 供了重要参考。

英文摘要：

We report the measurements of the nonlinear refractive index of porous silicon photonic crystal by the reflection Z-scan t echnique at 1064nm.The measured nonlinear refractive indices of porous sili- con microcavities of n2=-（2.16±0.15）×10^-10 cm^2·W^-1,poro us silicon Bragg mirrors of n2=-（7.24±0.17）×10^-10 cm^2·W^-1 and porous silicon polybasic multilayer of n2=-（3.73±0.09） ×10^-9cm^2·W^-1 are obtained from the curves.The negativ e value at the photon energy even well below the bandgap suggests that the optic al Stark effect gives the most contribution to the optical nonlinearity of the nanostructures.T he experimental results indicate an enhancement of the nonlinear refractive index of porous si licon polybasic multilayer,which suggests one-dimensional porous silicon photonic crystals for nonlinear optical applications,such as power limiting and optical switching.