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Defects as a factor limiting carrier mobility in WSe2: A spectroscopic investigation
  • ISSN号:1674-4926
  • 期刊名称:《半导体学报:英文版》
  • 时间:0
  • 分类:TN386[电子电信—物理电子学] TQ427.26[化学工程]
  • 作者机构:[1]Department of Physics andJiangsu Key Laboratory forAdvanced Metallic Materials, Southeast University, Nanjing 211189, China, [2]National Laboratory of Solid State Microstructure, School of Electronic Science and Engineering, National Center of Microstructures and Quantum Manipulation, Nanjing University, Nanjing 210093, China, [3]SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210095, China, [4]Jiangsu Key Laboratory for Design and Fabrication of Micro-Nano Biomedical Instruments, School of Mechanical Engineering, Southeast University, Nanjing 211189, China, [5]Ordered Matter Science Research Center, Southeast University, Nanjing 211189, China
  • 相关基金:This work was supported by National Natural Science Foundation of China (Nos. 61422503, 21541013 and 61376104), Natural Science Foundation of Jiangsu Province (No. BK20150596), Jiangsu key laboratory for advanced metallic materials (No. BM2007204), the open research funds of Key Laboratory of MEMS of Ministry of Education (SEU, China), and the Funda- mental Research Funds for the Central Universities. The authors would like to thank Prof. Zhenhua Qiao from USTC, China for helpful discussions.
中文摘要:

二维的转变金属 dichalcogenides (TMD ) 的电的表演被结构的缺点的数字强烈影响。在这个工作,我们提供一条光分光镜的描述途径相关结构的缺点的数字和 WSe 2 设备的电的表演。electron-beam-lithographyprocessed WSe 2 的低温度的光致发光(PL ) 系列由于缺点一定的激子展出清楚的导致缺点的 PL 排出物,它将强烈降级电的表演。由采用一种 electron-beam-free 转移电极技术,我们成功地准备了包含缺点的有限数量的一台 backgated WSe 2 设备。约 200 厘米 2 的最大的洞活动性

英文摘要:

The electrical performance of two-dimensional transition metal dichalcogenides (TMDs) is strongly affected by the number of structural defects. In this work, we provide an optical spectroscopic characterization approach to correlate the number of structural defects and the electrical performance of WSe2 devices. Low-temperature photoluminescence (PL) spectra of electron-beam-lithography- processed WSe2 exhibit a clear defect-induced PL emission due to excitons bound to defects, which would strongly degrade the electrical performance. By adopting an electron-beam-free transfer-electrode technique, we successfully prepared a backgated WSe2 device containing a limited amount of defects. A maximum hole mobility of approximately 200 cm2.V -1.s-1 was achieved because of the reduced scattering sources, which is the highest reported value for this type of device. This work provides not only a versatile and nondestructive method to monitor the defects in TMDs but also a new route to approach the room-temperature phonon-limited mobility in high-performance TMD devices.

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期刊信息
  • 《半导体学报:英文版》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国电子学会 中国科学院半导体研究所
  • 主编:李树深
  • 地址:北京912信箱
  • 邮编:100083
  • 邮箱:cjs@semi.ac.cn
  • 电话:010-82304277
  • 国际标准刊号:ISSN:1674-4926
  • 国内统一刊号:ISSN:11-5781/TN
  • 邮发代号:2-184
  • 获奖情况:
  • 90年获中科院优秀期刊二等奖,92年获国家科委、中共中央宣传部和国家新闻出版署...,97年国家科委、中共中央中宣传部和国家新出版署三等奖,中国期刊方阵“双效”期刊
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  • 被引量:7754