中文摘要：

设计并实现了磁控溅射仪自动监控系统，对实验过程进行自动监控并记录实验数据，由服务器主控程序监控实验，存储并识别数字数据，识别过程是调用Matlab语言编写的识别系统生成的动态链接库，用BP神经网络训练神经元来进行识别，可以由客户端主控程序调用并查看实验数据曲线，实现实时的远程监控，解决了磁控溅射仪没有数据输出接口不方便记录实验数据的困难及实验过程中高辐射对人体危害的问题．整个系统识别效率高，速度快，准确性高，自动监控实验过程，具有很高的实用价值和应用前景．

英文摘要：

This paper describes the automatic monitoring system about the magnetron sputtering apparatus, tne system can monitor the experiment process and record experiment data automatically. Main control programming of the Server can storage and recognize the digital data, The recognition process was fulfilled by calling the dynamic link library compiled in Matlab language. The dynamic link library uses BP neural network to train neurons for the recognition. At the same time, the client programming can call and check the experiment data curve. It can achieve real-time remote monitoring. The paper solves the problems of inconvenient data records of the magnetron sputtering apparatus for the absence of data output interface and the high radiation on the human body. The entire system is efficient in recognition, speedy, precisely and has the function of automatic monitoring during the experiment process. So it has very high practical value and prospects.