中文摘要：

目的通过对三维立体通道模具的制作进行研究，以制备能生产高效低价均一载药微液滴的三维立体微流控芯片。方法试验过程中对芯片模具基底材料，曝光时间、刻蚀时间对三维立体微流控芯片模具制作的影响，及聚二甲基硅氧烷（PDMS）的配方和固化温度对微流控芯片成型的影响进行了系统地研究，获得最优化工艺参数，制备出最适合于产生载药微液滴的微流控芯片。结果有机玻璃板综合性能最优，可作为芯片模具基底材料；刻蚀时间、曝光时间随通道厚度的增加而增长。对于层数较少的掩膜（如1、2层）最佳曝光时间为10、15s。一般采用大于临界时间，使所需通道稍微过曝。以PDMS为材料注塑成型制备出理想的三维通道微流控芯片，并采用自动进样泵于各通道注入不同液相来高速制备尺寸可控的均一微液滴。结论该模具制备方法快速、价格低廉，克服了大多数三维微流控芯片模具制作工艺复杂、成本高昂等缺点，PDMS注塑成型技术操作简单，可满足快速生成粒径理想、尺寸均一化、重现性好的载药微液滴的要求。

英文摘要：

Objective To manufacture the three dimensional microfluidic chip that can generate high efficiency, low price and uniform drug-loaded micro-droplets through the study of three dimensional channel mold manufacturing. Methods The matrix material of chip mold, effect of exposure time and etching time on three dimensional microfluidic chip mold preparation and formulation and solidification temperature of PDMS on mierofluidic chip forming were systematically studied during the experiment process, the most optimized process parameters were got, and microfluidie chip most suited to generate drug- loaded micro-droplets were make. Results The polymethylmethacrylate sheet had the overall best performance and was used as matrix material of chip mold. The exposure time and etching time increased as the thickness of the channel increased. The best exposure time was 10, 15 seconds for low-rise mask such as 1 and 2 layer. It was used that the exposure time was more than the critical time generally, the required channel slightly solarized. The three dimensional channel mierofluidic chip was manufactured by PDMS injection molding, and the size-controlled and uniform micro-droplets were manufactured through using automatic injection pump to inject different liquid in each channel. Conclusion The mold preparation method is fast,inexpensive,and can overcome the shortcomings of complex manufacturing processes and high cost of most three dimensional mierofluidie chip mold preparation, and PDMS injection molding technology has simple operation and can meet the needs of quickly generated of drug-loaded micro-droplets with perfect grain diameter, uniformity size and good reproducibility.