中文摘要：

提出了一种新的电容式压力传感器，传感器结构为由Al／SiO2／n—type Si等三层方形膜构成的固态电容．传感器采用pn结自停止腐蚀和粘结剂键合的方式制造，制造过程仅需三块掩模板．对不同边长传感器进行测试，在410～1010hPa的动态范围，边长为1000，1200和1400μm的压力传感器，相应灵敏度分别为1．8，2．3和3．6fF／hPa．边长为1500μm的传感器，其灵敏度为4．6fF／hPa，全程非线性度为6．4％，最大滞回误差为3．6％．分析结果表明介电常数变化是引起电容变化的主要原因．

英文摘要：

A novel capacitive pressure sensor is presented, whose sensing structure is a solid-state capacitor consisting of three square membranes with Al/SiO2/n-type silicon. It was fabricated using pn junction self-stop etching combined with adhesive bonding,and only three masks were used during the process. Sensors with side lengths of 1000,1200,and 1400μm were fabricated,showing sensitivity of 1.8,2.3, and 3.6fF/hPa over the range of 410～ 1010hPa, respectively. The sensi- tivity of the sensor with a side length of 1500μm is 4. 6fF/hPa,the nonlinearity is 6. 4% ,and the max hysteresis is 3.6%. The results show that permittivity change plays an important part in the capacitance change.