中文摘要：

为了提高寄生式时栅角位移传感器的精度，深入分析误差源产生机理和变化规律，确定其主次影响因素，通过对传感器结构分析和行波公式推导分析，得到寄生式时栅角位移传感器的主要误差来源，包括两相激励信号时间、空间正交性误差以及驻波信号幅值误差、线圈零点残余电压引起的误差等．对各误差分量的具体谐波频率次数进行理论推导，确定了产生不同谐波误差分量的具体原因，并通过实验进行验证．验证结果表明：导致传感器产生零点残余电压的误差影响因素对传感器测量精度的影响最为显著，为寄生式时栅传感器的主要误差来源；激励信号的时间、空间正交误差及两列驻波信号的幅值不等为次要来源．

英文摘要：

In order to improve the accuracy of the parasitic time grating angular displacement sensor, to analyze the mechanism and the changing principle of the error sources, and to ensure its primary and secondary influence factors, the sensor structure was analyzed and the traveling equation was de- rived in this paper. The main error sources of the sensor were obtained, which include time and space orthogonal error of two phase excitation signal, amplitude error of standing wave signal, error caused by residual voltage at zero point of coil and so on. The specific harmonic frequency of each error com- ponent was theoretically derived. The specific causes of the different harmonic error components were determined and verified by experiments. The verification results show that the error caused by residu- al voltage at zero point of coil is the main error source of the sensor, and it has the most significant in fluence on the sensor accuracy. Time and space orthogonal error of two phase excitation signal and amplitude error of standing wave signal are the secondary sources.