中文摘要：

冷阴极在X射线源中有重要应用。本文结合微加工技术和磁控溅射镀膜技术,采用直接热氧化法实现了在玻璃衬底上大面积定域制备氧化钨（WO3）纳米线阵列。制备所得的WO3纳米线具有较大的长径比。场发射特性测试表明,该WO3纳米线冷阴极具有良好的场发射特性,开启电场为4.9V/μm,发射均匀性好,有望应用在平板X射线源中。

英文摘要：

Cold cathode emitters have important applications in X-ray sources.Combining microfabrication technology with magnetron sputtering deposition,large-area patterned tungsten oxide（WO3）nanowire arrays were prepared on glass substrate by thermal oxidation method.The as-synthesized WO3 nanowires have high aspect ratio.Field emission measurement of WO3 nanowire arrays shows that the arrays have excellent field emission properties and good emission uniformity with a turn-on electric field of 4.9V/μm,which reveals that the WO3 nanowires have potential applications in flat-panel X-ray sources.