中文摘要：

在单晶硅表面制备稀土改性碳纳米管自组装复合薄膜，采用接触角测定仪、扫描电子显微镜以及X射线光电子能谱仪分析表征薄膜的组成和结构，在UMT-2MT型摩擦磨损试验机上评价薄膜的摩擦磨损性能．结果表明：稀土改性碳纳米管可以组装到氧化的硅烷化表面而形成碳纳米管复合薄膜；复合薄膜表现出优异的摩擦磨损性能，在给定的试验条件下，其摩擦系数约为0．10～0．12，并随载荷和滑动速度增加而减小，具有较好的耐磨性能及摩擦稳定性，在微机械表面改性中显示出潜在的应用前景．

英文摘要：

Rare earth （RE） treated carbon nanotube （CNT） composite thin films were prepared on hydroxylated silicon substrates by a self-assembling process from specially formulated solution. The resultant composite film was characterized by means of scanning electron microscope （SEM） and X-ray photoelectron spectroscopy （XPS）. The contact angles of distilled water on the silane SAMs and the composite film were measured to compare the surface states. The tribological properties of the films sliding against GCrl5 steel ball were evaluated on a UMT-2MT reciprocating friction and wear tester. The results show that CNT composite films are deposited on oxidized MPTS-SAM, making use of the chemisorption ability of -SO3 H group. The CNT composite thin films show excellent tribological properties. The friction coefficient value is about 0.10 after 1 000 sliding cycles, and the friction coefficient of composite films decreases with in- creasing load and sliding velocity. The stability of friction and wear resistance of CNT composite films are improved, indicating its promising applications in microelectromechanical system （MEMS） field.