中文摘要：

为解决微流控芯片检测中由于盖片的双重折射效应导致的聚焦误差、色差和视场误差等问题，从折射基本定理出发，结合光学体视显微镜（SLM）的双光路结构，建立了SLM显微立体视觉双重折射变折射率校正算法，实现了对透明封闭容腔的非接触无损三维精确测量．在微沟道测量实验中，深度方向的测量误差由7．1μm减小到1．5μm，相对误差由18．68％减小到3．95％．SLM显微立体视觉三维测量系统与表面轮廓仪、激光共焦扫描显微镜的横向对比测量实验，证明了SLM显微立体视觉双重折射变折射率校正的必要性和有效性．

英文摘要：

Double refraction of cover plate leads to focus error, chromatic aberration and visual field error in the microfluidic chip detection. A double refraction variable refractive index cor rection algorithm was established by combining double optical path structure of stereo light microscope （SLM） based on the refraction fundamental theorem. The algorithm realizes rapid nondestructive noncontact 3D precision measurement of hyaloid and closed chamber. Tests on the microchannel show that the measurement error of the depth direction decreases from 7.1 /~m to 1.5 ktm and the relative error decreases from 18.68% to 3.95 %. Compared with Surfcorder ET4000M and LEXT, the results of the SLM micro stereo measurement system demon strate the necessity and the validity of the double refraction vari able refractive index correction in SLM micro stereo vision.