中文摘要：

通过剖析可重入制造系统控制的需求，提出双反馈控制的协同控制策略。为使复杂制造系统的控制问题降阶，提出包括系统层协调机制、设备组／设备协调机制以及重调度协调机制的分层协同控制机制。基于混合控制原理，提出基于Multi-agent的中心协调与局部协调相结合的自治控制系统体系结构，以满足可重入制造系统非线性动态控制的需求，该体系结构具有分布性、智能性、健壮性、开放性和实时性等特点。为了实现所提出的可重入制造系统协同控制系统的体系结构，建立了基于HLA／CORBA的多层软件体系结构，该体系结构由基础层、分布对象层、Agent层、应用层等四层组成。试验表明，所提出的分层协同控制机制进行半导体生产系统的调度时，在晶圆日产出量和设备组利用率方面要优于设备组动态调度和企业中使用的启发式规则调度方法。

英文摘要：

The needs of control system of reentrant manufacturing system are analyzed and the double-feedback-based collaborative control strategy for reentrant manufacturing system is proposed. To decrease the complexity of control system for manufacturing system, a layered ＆ collaborative control mechanism is addressed, which includes the system layer coord/nation mechanism, machine group / machine layer one, and rescheduling one. Based on principal of mixed control, a multi-agent-based architecture of autonomous control system which integrates central coordination and local one is proposed so as to make the requirement of non-linear dynamic control of reentrant manufacturing system, it has the main characteristics including distribution, intelfigence, robustness, openness, real-time, etc. To implement the proposed architecture of collaborative control system, an HLA/CORBA-based multi-lever software framework is designed, which includes the base level, distributed object level, agent level and application level. The experiment results show the collaborative control mechanism above proposed takes precedence of the dynamic scheduling in machine groups and the scheduling of heuristic rule in the daily throughput of wafers and the utilization rate of machine groups.