从理论分析和实验研究了哥氏力对剪切型声表面波传播属性影响。理论分析方面表明,在哥氏力作用下剪切型声表面波中质点的运动方式发生了变化,已不再是纯剪切运动,而是变为椭圆运动,从而改变声波的传播速度。在实验方面,选择综合性能优良的ST-90oX切石英晶片为基底材料,设计了差分结构的剪切型声表面波器件,并设计相应的工作检测电路,通过实验,检测出旋转角速率使声表面波的频率发生了变化,验证了哥氏力对剪切型声表面波的影响。
In this paper,the effect of Coriolis force on propagation properties of shear horizontal surface acoustic wave(SH-SAW) is studied based on the theoretical analysis and experiment.The theoretical analysis shows the motion of each particle in the SH-SAW is the elliptical motion rather than the pure shear motion under the action of Coriolis force,which may change the wave velocity.In the experiment,the SH-SAW device with differential structure is designed and fabricated by using the ST-90o-cut quartz slice with good overall characteristics as substrate materials,and the signal processing circuit is designed.The experiment results show the frequency of acoustic wave vary with the rotation rate of the SH-SAW device,which is consistent with the theoretical results.